Mechanical and structural properties of in-situ doped PECVD SiC layers for post-processing surface micromachining.

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Name

Name
Volume	4557

Keywords

@inproceedings{b94a4d446b994267acff1559b5d4b195,

title = "Mechanical and structural properties of in-situ doped PECVD SiC layers for post-processing surface micromachining.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "TMH Pham and {de Boer}, CR and C Kwakernaak and WG Sloof and PM Sarro",

year = "2001",

language = "Undefined/Unknown",

isbn = "0-8194-4285-2",

pages = "272--279",

booktitle = "Proceedings of the SPIE, 4557.",

}

TY - GEN

T1 - Mechanical and structural properties of in-situ doped PECVD SiC layers for post-processing surface micromachining.

AU - Pham, TMH

AU - de Boer, CR

AU - Kwakernaak, C

AU - Sloof, WG

AU - Sarro, PM

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0-8194-4285-2

SP - 272

EP - 279

BT - Proceedings of the SPIE, 4557.

ER -