@inproceedings{d662a1c5bc8a4843a8182072970ad166,
title = "Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-processing surface micromachining",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "HMT Pham and {de Boer}, CR and K Kwakernaak and WG Sloof and PM Sarro",
year = "2001",
language = "Undefined/Unknown",
isbn = "0277-786X",
publisher = "International Society for Optical Engineering",
pages = "272--279",
editor = "{J-M Karam} and {J Yasaitis}",
booktitle = "Proceedings of SPIE. Vol. 4557",
note = "Micromachining and Microfabrication Pocess Technology VII, San Francisco ; Conference date: 22-10-2001 Through 24-10-2001",
}