Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-processing surface micromachining

HMT Pham; CR de Boer; K Kwakernaak; WG Sloof; PM Sarro

Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-processing surface micromachining

HMT Pham, CR de Boer, K Kwakernaak, WG Sloof, PM Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

7 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	Proceedings of SPIE. Vol. 4557
Editors	J-M Karam, J Yasaitis
Place of Publication	Bellingham
Publisher	International Society for Optical Engineering
Pages	272-279
Number of pages	8
ISBN (Print)	0277-786X
Publication status	Published - 2001
Event	Micromachining and Microfabrication Pocess Technology VII, San Francisco - Bellingham Duration: 22 Oct 2001 → 24 Oct 2001

Publication series

Name
Publisher	International Society for Optical Engineering

Conference

Conference	Micromachining and Microfabrication Pocess Technology VII, San Francisco
Period	22/10/01 → 24/10/01

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this

@inproceedings{d662a1c5bc8a4843a8182072970ad166,

title = "Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-processing surface micromachining",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "HMT Pham and {de Boer}, CR and K Kwakernaak and WG Sloof and PM Sarro",

year = "2001",

language = "Undefined/Unknown",

isbn = "0277-786X",

publisher = "International Society for Optical Engineering",

pages = "272--279",

editor = "{J-M Karam} and {J Yasaitis}",

booktitle = "Proceedings of SPIE. Vol. 4557",

note = "Micromachining and Microfabrication Pocess Technology VII, San Francisco ; Conference date: 22-10-2001 Through 24-10-2001",

}

Pham, HMT, de Boer, CR, Kwakernaak, K, Sloof, WG & Sarro, PM 2001, Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-processing surface micromachining. in J-M Karam & J Yasaitis (eds), Proceedings of SPIE. Vol. 4557. International Society for Optical Engineering, Bellingham, pp. 272-279, Micromachining and Microfabrication Pocess Technology VII, San Francisco, 22/10/01.

Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-processing surface micromachining. / Pham, HMT; de Boer, CR; Kwakernaak, K et al.
Proceedings of SPIE. Vol. 4557. ed. / J-M Karam; J Yasaitis. Bellingham: International Society for Optical Engineering, 2001. p. 272-279.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-processing surface micromachining

AU - Pham, HMT

AU - de Boer, CR

AU - Kwakernaak, K

AU - Sloof, WG

AU - Sarro, PM

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0277-786X

SP - 272

EP - 279

BT - Proceedings of SPIE. Vol. 4557

A2 - J-M Karam, null

A2 - J Yasaitis, null

PB - International Society for Optical Engineering

CY - Bellingham

T2 - Micromachining and Microfabrication Pocess Technology VII, San Francisco

Y2 - 22 October 2001 through 24 October 2001

ER -