Mechanical behaviour during thermal cycling of AIVPd line patterns

JP Lokker, AJ Kalkman, H Schellevis, GCAM Janssen, S Radelaar

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Journal	Microelectronic Engineering
Volume	33
Publication status	Published - 1997

Cite this

@article{fffb42e1854f4fc390ddcee6aba54da8,

title = "Mechanical behaviour during thermal cycling of AIVPd line patterns",

author = "JP Lokker and AJ Kalkman and H Schellevis and GCAM Janssen and S Radelaar",

year = "1997",

language = "Undefined/Unknown",

volume = "33",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}