TY - JOUR
T1 - Mechanical characterization and cleaning of CVD single-layer h-BN resonators
AU - Cartamil-Bueno, Santiago J.
AU - Cavalieri, Matteo
AU - Wang, Ruizhi
AU - Houri, Samer
AU - Hofmann, Stephan
AU - van der Zant, Herre S.J.
PY - 2017
Y1 - 2017
N2 - Hexagonal boron nitride is a 2D material whose single-layer allotrope has not been intensively studied despite being the substrate for graphene electronics. Its transparency and stronger interlayer adhesion with respect to graphene makes it difficult to work with, and few applications have been proposed. We have developed a transfer technique for this extra-adhesive material that does not require its visual localization, and fabricated mechanical resonators made out of chemical vapor-deposited single-layer hexagonal boron nitride. The suspended material was initially contaminated with polymer residues from the transfer, and the devices showed an unexpected tensioning when cooling them to 3 K. After cleaning in harsh environments with air at 450 °C and ozone, the temperature dependence changed with f0Q products reaching 2 × 1010 Hz at room temperature. This work paves the way to the realization of highly sensitive mechanical systems based on hexagonal boron nitride, which could be used as an alternative material to SiN for optomechanics experiments at room temperature.
AB - Hexagonal boron nitride is a 2D material whose single-layer allotrope has not been intensively studied despite being the substrate for graphene electronics. Its transparency and stronger interlayer adhesion with respect to graphene makes it difficult to work with, and few applications have been proposed. We have developed a transfer technique for this extra-adhesive material that does not require its visual localization, and fabricated mechanical resonators made out of chemical vapor-deposited single-layer hexagonal boron nitride. The suspended material was initially contaminated with polymer residues from the transfer, and the devices showed an unexpected tensioning when cooling them to 3 K. After cleaning in harsh environments with air at 450 °C and ozone, the temperature dependence changed with f0Q products reaching 2 × 1010 Hz at room temperature. This work paves the way to the realization of highly sensitive mechanical systems based on hexagonal boron nitride, which could be used as an alternative material to SiN for optomechanics experiments at room temperature.
UR - http://www.scopus.com/inward/record.url?scp=85029747043&partnerID=8YFLogxK
U2 - 10.1038/s41699-017-0020-8
DO - 10.1038/s41699-017-0020-8
M3 - Article
SN - 2397-7132
VL - 1
JO - npj 2D Materials and Applications
JF - npj 2D Materials and Applications
IS - 1
M1 - 16
ER -