Mechanical characterization and cleaning of CVD single-layer h-BN resonators

Santiago J. Cartamil-Bueno*, Matteo Cavalieri, Ruizhi Wang, Samer Houri, Stephan Hofmann, Herre S.J. van der Zant

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

26 Citations (Scopus)
27 Downloads (Pure)


Hexagonal boron nitride is a 2D material whose single-layer allotrope has not been intensively studied despite being the substrate for graphene electronics. Its transparency and stronger interlayer adhesion with respect to graphene makes it difficult to work with, and few applications have been proposed. We have developed a transfer technique for this extra-adhesive material that does not require its visual localization, and fabricated mechanical resonators made out of chemical vapor-deposited single-layer hexagonal boron nitride. The suspended material was initially contaminated with polymer residues from the transfer, and the devices showed an unexpected tensioning when cooling them to 3 K. After cleaning in harsh environments with air at 450 °C and ozone, the temperature dependence changed with f0Q products reaching 2 × 1010 Hz at room temperature. This work paves the way to the realization of highly sensitive mechanical systems based on hexagonal boron nitride, which could be used as an alternative material to SiN for optomechanics experiments at room temperature.

Original languageEnglish
Article number16
Number of pages7
Journalnpj 2D Materials and Applications
Issue number1
Publication statusPublished - 2017


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