@inproceedings{1f1d7c0cce0e4e68af2e7c3285aa5737,
title = "Mechanical characterization of SiLK by Nanoindentation and substrate curvature techniques",
keywords = "Conf.proc. > 3 pag",
author = "V Gonda and KMB Jansen and LJ Ernst and {den Toonder}, J and GQ Zhang",
note = "IEEE Cat No. 04EX831; EuroSimE 2004: 5th international conference on thermal and mechanical simulation and experiments in microelectronics and microsystems ; Conference date: 10-05-2004 Through 12-05-2004",
year = "2004",
language = "Undefined/Unknown",
isbn = "0-7803-8420-2",
publisher = "IEEE Society",
pages = "373--376",
editor = "LJ Ernst and GQ Zhang and P Rodgers and {de Saint Leger}, O",
booktitle = "EuroSimE 2004: 5th international conference on thermal and mechanical simulation and experiments in microelectronics and microsystems",
}