Mechanical design and characterization for MEMS thin-film packaging

F Santagata, JJM Zaal, VG Huerta, L Mele, JF Creemer, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

20 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-10
Number of pages10
JournalIEEE Journal of Microelectromechanical Systems
Volume20
Issue number5
DOIs
Publication statusPublished - 2011

Keywords

  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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