@article{247bfdf6578b4d4585b50326259eae9f,
title = "Mechanical design and characterization for MEMS thin-film packaging",
keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",
author = "F Santagata and JJM Zaal and VG Huerta and L Mele and JF Creemer and PM Sarro",
year = "2011",
doi = "10.1109/JMEMS.2011.2170817",
language = "English",
volume = "20",
pages = "1--10",
journal = "IEEE Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers (IEEE)",
number = "5",
}