Mechanical Reliability of CVD-Copper Thin Films

JF Jongste, JP Lokker, GCAM Janssen, S Radelaar, J Torres, J Palleau

    Research output: Contribution to journalArticlepeer-review

    6 Citations (Scopus)
    Original languageUndefined/Unknown
    JournalMicroelectronic Engineering
    Volume33
    Publication statusPublished - 1997

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