TY - JOUR
T1 - Mechanical Resonators for Quantum Optomechanics Experiments at Room Temperature
AU - Norte, R. A.
AU - Moura, J. P.
AU - Groeblacher, S.
PY - 2016/4/5
Y1 - 2016/4/5
N2 - All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here, we present a novel design of on-chip mechanical resonators which exhibit fundamental modes with frequencies f and mechanical quality factors Qm sufficient to enter the optomechanical quantum regime at room temperature. We overcome previous limitations by designing ultrathin, high-stress silicon nitride (Si3N4) membranes, with tensile stress in the resonators’ clamps close to the ultimate yield strength of the material. By patterning a photonic crystal on the SiN membranes, we observe reflectivities greater than 99%. These on-chip resonators have remarkably low mechanical dissipation, with Qm∼108, while at the same time exhibiting large reflectivities. This makes them a unique platform for experiments towards the observation of massive quantum behavior at room temperature.
AB - All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here, we present a novel design of on-chip mechanical resonators which exhibit fundamental modes with frequencies f and mechanical quality factors Qm sufficient to enter the optomechanical quantum regime at room temperature. We overcome previous limitations by designing ultrathin, high-stress silicon nitride (Si3N4) membranes, with tensile stress in the resonators’ clamps close to the ultimate yield strength of the material. By patterning a photonic crystal on the SiN membranes, we observe reflectivities greater than 99%. These on-chip resonators have remarkably low mechanical dissipation, with Qm∼108, while at the same time exhibiting large reflectivities. This makes them a unique platform for experiments towards the observation of massive quantum behavior at room temperature.
UR - http://resolver.tudelft.nl/uuid:9a19755b-7f7a-4f75-82fa-87483009a89c
U2 - 10.1103/PhysRevLett.116.147202
DO - 10.1103/PhysRevLett.116.147202
M3 - Article
SN - 0031-9007
VL - 116
JO - Physical Review Letters
JF - Physical Review Letters
IS - 14
M1 - 147202
ER -