Mechanical robustness and hermeticity monitoring for MEMS thin film encapsulation

F Santagata

Research output: Thesis › Dissertation (TU Delft)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Sarro, P.M., Supervisor
Award date	6 Dec 2011
Print ISBNs	978-90-8570-759-2
Publication status	Published - 2011

Keywords

@phdthesis{74260128379f44cca121986cfcbd6105,

title = "Mechanical robustness and hermeticity monitoring for MEMS thin film encapsulation",

keywords = "Diss. prom. aan TU Delft",

author = "F Santagata",

year = "2011",

language = "English",

isbn = "978-90-8570-759-2",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}