Mechanical spectrum analyzer in silicon using micromachined accelerometers with time-varying electrostatic feedback

LA Machado da Rocha; E Cretu; G de Graaf; RF Wolffenbuttel

Mechanical spectrum analyzer in silicon using micromachined accelerometers with time-varying electrostatic feedback

LA Machado da Rocha, E Cretu, G de Graaf, RF Wolffenbuttel

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	IMTC'03 20th IEEE instrumentation and measurement technology conference. Vol. 1
Editors	s.n.
Place of Publication	Piscataway
Publisher	IEEE Society
Pages	1197-1201
Number of pages	5
ISBN (Print)	0-7803-7705-2
Publication status	Published - 2003
Event	20th IEEE instrumentation and measurement technology conference Vol. 1, Vail, COL. USA - Piscataway Duration: 20 May 2003 → 22 May 2003

Publication series

Name
Publisher	IEEE

Conference

Conference	20th IEEE instrumentation and measurement technology conference Vol. 1, Vail, COL. USA
Period	20/05/03 → 22/05/03

Keywords

Elektrotechniek
Techniek
Conf.proc. > 3 pag

Cite this

@inproceedings{f946684e6e9c4f9bbb0092f3581a7f4e,

title = "Mechanical spectrum analyzer in silicon using micromachined accelerometers with time-varying electrostatic feedback",

keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",

author = "{Machado da Rocha}, LA and E Cretu and {de Graaf}, G and RF Wolffenbuttel",

year = "2003",

language = "Undefined/Unknown",

isbn = "0-7803-7705-2",

publisher = "IEEE Society",

pages = "1197--1201",

editor = "s.n.",

booktitle = "IMTC'03 20th IEEE instrumentation and measurement technology conference. Vol. 1",

note = "20th IEEE instrumentation and measurement technology conference Vol. 1, Vail, COL. USA ; Conference date: 20-05-2003 Through 22-05-2003",

}

Machado da Rocha, LA, Cretu, E, de Graaf, G & Wolffenbuttel, RF 2003, Mechanical spectrum analyzer in silicon using micromachined accelerometers with time-varying electrostatic feedback. in s.n. (ed.), IMTC'03 20th IEEE instrumentation and measurement technology conference. Vol. 1. IEEE Society, Piscataway, pp. 1197-1201, 20th IEEE instrumentation and measurement technology conference Vol. 1, Vail, COL. USA, 20/05/03.

Mechanical spectrum analyzer in silicon using micromachined accelerometers with time-varying electrostatic feedback. / Machado da Rocha, LA; Cretu, E; de Graaf, G et al.
IMTC'03 20th IEEE instrumentation and measurement technology conference. Vol. 1. ed. / s.n. Piscataway: IEEE Society, 2003. p. 1197-1201.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Mechanical spectrum analyzer in silicon using micromachined accelerometers with time-varying electrostatic feedback

AU - Machado da Rocha, LA

AU - Cretu, E

AU - de Graaf, G

AU - Wolffenbuttel, RF

PY - 2003

Y1 - 2003

KW - Elektrotechniek

KW - Techniek

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0-7803-7705-2

SP - 1197

EP - 1201

BT - IMTC'03 20th IEEE instrumentation and measurement technology conference. Vol. 1

A2 - s.n., null

PB - IEEE Society

CY - Piscataway

T2 - 20th IEEE instrumentation and measurement technology conference Vol. 1, Vail, COL. USA

Y2 - 20 May 2003 through 22 May 2003

ER -