Mechanical stability and handling-induced failure of micromachined wafers for RF applications

A Polykov, M Bartek, JN Burghartz

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    4 Citations (Scopus)
    Original languageUndefined/Unknown
    Title of host publicationProceedings
    Place of PublicationPiscataway
    PublisherIEEE Society
    Pages102-109
    Number of pages8
    ISBN (Print)0-7803-7129-1
    Publication statusPublished - 2001
    EventTopical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, S.l. - Piscataway
    Duration: 12 Sep 200114 Sep 2001

    Publication series

    Name
    PublisherIEEE

    Conference

    ConferenceTopical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, S.l.
    Period12/09/0114/09/01

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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