Mechanical study of silicon nitride layers of thin flexible substrates under bending

BAZ Mimoun, O Gourhant, R Dekker

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	proceedings of 12th workshop on semiconductors
Editors	S.N.
Place of Publication	Veldhoven
Publisher	STW
Pages	95-98
Number of pages	4
ISBN (Print)	978-90-73461-62-8
Publication status	Published - 2009
Event	SAFE 2009 - Veldhoven, The Netherlands Duration: 26 Dec 2009 → 27 Dec 2009

Name
Publisher	STW

Conference	SAFE 2009
Period	26/12/09 → 27/12/09

Keywords

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title = "Mechanical study of silicon nitride layers of thin flexible substrates under bending",

keywords = "Conf.proc. > 3 pag",

author = "BAZ Mimoun and O Gourhant and R Dekker",

year = "2009",

language = "English",

isbn = "978-90-73461-62-8",

publisher = "STW",

pages = "95--98",

editor = "S.N.",

booktitle = "proceedings of 12th workshop on semiconductors",

note = "SAFE 2009 ; Conference date: 26-12-2009 Through 27-12-2009",

}

TY - GEN

T1 - Mechanical study of silicon nitride layers of thin flexible substrates under bending

AU - Mimoun, BAZ

AU - Gourhant, O

AU - Dekker, R

PY - 2009

Y1 - 2009

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-90-73461-62-8

SP - 95

EP - 98

BT - proceedings of 12th workshop on semiconductors

A2 - S.N., null

PB - STW

CY - Veldhoven

T2 - SAFE 2009

Y2 - 26 December 2009 through 27 December 2009

ER -