Mechanical-thermal and 1/f noise in MEMS devices

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	MME 2004; Proceedings of the 15th micromechanics Europe workshop
Place of Publication	s.l.
Publisher	s.n.
Pages	100-103
Number of pages	4
ISBN (Print)	90-5682-535-6
Publication status	Published - 2004
Event	15th Micromechanics Europe workshop, Leuven, Belgium - s.l. Duration: 5 Sept 2004 → 7 Sept 2004

Name
Publisher	s.n.

Conference	15th Micromechanics Europe workshop, Leuven, Belgium
Period	5/09/04 → 7/09/04

ed. is niet bekend

Keywords

@inproceedings{f161ad5082ba4e629661822e00d461ec,

title = "Mechanical-thermal and 1/f noise in MEMS devices",

keywords = "Conf.proc. > 3 pag",

author = "LA Rocha and E Cretu and RF Wolffenbuttel",

note = "ed. is niet bekend; 15th Micromechanics Europe workshop, Leuven, Belgium ; Conference date: 05-09-2004 Through 07-09-2004",

year = "2004",

language = "Undefined/Unknown",

isbn = "90-5682-535-6",

publisher = "s.n.",

pages = "100--103",

booktitle = "MME 2004; Proceedings of the 15th micromechanics Europe workshop",

}

TY - GEN

T1 - Mechanical-thermal and 1/f noise in MEMS devices

AU - Rocha, LA

AU - Cretu, E

AU - Wolffenbuttel, RF

N1 - ed. is niet bekend

PY - 2004

Y1 - 2004

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 90-5682-535-6

SP - 100

EP - 103

BT - MME 2004; Proceedings of the 15th micromechanics Europe workshop

PB - s.n.

CY - s.l.

T2 - 15th Micromechanics Europe workshop, Leuven, Belgium

Y2 - 5 September 2004 through 7 September 2004

ER -