Original language | English |
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Title of host publication | Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies |
Editors | K Takahata |
Place of Publication | Rijeka, Croatia |
Publisher | Intech |
Pages | 155-186 |
Number of pages | 226 |
ISBN (Print) | 978-953-51-1085-9 |
DOIs | |
Publication status | Published - 2013 |
Mechanics of nanoelectromechanical systems: bridging the gap between experiment and theory
H Sadeghian Marnani, F van Keulen, JFL Goosen
Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific