Mechanism of incongruent ablation of SrTiO3

B. Dam; J. H. Rector; J. Johansson; J. Huijbregtse; D. G. De Groot

doi:10.1063/1.367106

Mechanism of incongruent ablation of SrTiO₃

B. Dam^*, J. H. Rector, J. Johansson, J. Huijbregtse, D. G. De Groot

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

39 Citations (Scopus)

Abstract

At low fluences, the [Sr]/[Ti] ratio of laser deposited SrTiO₃ films appears to be a function of the laser fluence. The deviation from stoichiometry is remarkably constant in time. From an analysis of both the composition of the film and the irradiated target, we deduce a volume-diffusion-assisted preferential ablation process. At high fluences (above 1.3 J/cm²), stoichiometric SrTiO₃ films are obtained. This is not due to a change in ablation mechanism, but follows from the fact that at 1.3 J/cm² the calculated diffusion length of Sr within the irradiated target, becomes of the order of the ablation rate per shot.

Original language	English
Pages (from-to)	3386-3389
Number of pages	4
Journal	Journal of Applied Physics
Volume	83
Issue number	6
DOIs	https://doi.org/10.1063/1.367106
Publication status	Published - 1998

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author = "B. Dam and Rector, {J. H.} and J. Johansson and J. Huijbregtse and {De Groot}, {D. G.}",

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AU - Dam, B.

AU - Rector, J. H.

AU - Johansson, J.

AU - Huijbregtse, J.

AU - De Groot, D. G.

PY - 1998

Y1 - 1998

N2 - At low fluences, the [Sr]/[Ti] ratio of laser deposited SrTiO3 films appears to be a function of the laser fluence. The deviation from stoichiometry is remarkably constant in time. From an analysis of both the composition of the film and the irradiated target, we deduce a volume-diffusion-assisted preferential ablation process. At high fluences (above 1.3 J/cm2), stoichiometric SrTiO3 films are obtained. This is not due to a change in ablation mechanism, but follows from the fact that at 1.3 J/cm2 the calculated diffusion length of Sr within the irradiated target, becomes of the order of the ablation rate per shot.

AB - At low fluences, the [Sr]/[Ti] ratio of laser deposited SrTiO3 films appears to be a function of the laser fluence. The deviation from stoichiometry is remarkably constant in time. From an analysis of both the composition of the film and the irradiated target, we deduce a volume-diffusion-assisted preferential ablation process. At high fluences (above 1.3 J/cm2), stoichiometric SrTiO3 films are obtained. This is not due to a change in ablation mechanism, but follows from the fact that at 1.3 J/cm2 the calculated diffusion length of Sr within the irradiated target, becomes of the order of the ablation rate per shot.

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JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

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ER -

Mechanism of incongruent ablation of SrTiO₃

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