Mechanism of incongruent ablation of SrTiO3

B. Dam*, J. H. Rector, J. Johansson, J. Huijbregtse, D. G. De Groot

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

39 Citations (Scopus)

Abstract

At low fluences, the [Sr]/[Ti] ratio of laser deposited SrTiO3 films appears to be a function of the laser fluence. The deviation from stoichiometry is remarkably constant in time. From an analysis of both the composition of the film and the irradiated target, we deduce a volume-diffusion-assisted preferential ablation process. At high fluences (above 1.3 J/cm2), stoichiometric SrTiO3 films are obtained. This is not due to a change in ablation mechanism, but follows from the fact that at 1.3 J/cm2 the calculated diffusion length of Sr within the irradiated target, becomes of the order of the ablation rate per shot.

Original languageEnglish
Pages (from-to)3386-3389
Number of pages4
JournalJournal of Applied Physics
Volume83
Issue number6
DOIs
Publication statusPublished - 1998

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