Membrane based surface-stress sensors: Sensitivity, reliability, precision and accuracy

Banafsheh Sajadi, Hans Goosen, Fred van Keulen

Research output: Contribution to conferenceAbstractScientific

40 Downloads (Pure)
Original languageEnglish
Pages143-144
Publication statusPublished - 2016
Event13th International Workshop on Nanomechanical Sensing - Delft, Netherlands
Duration: 22 Jun 201624 Jun 2016

Workshop

Workshop13th International Workshop on Nanomechanical Sensing
Abbreviated titleNMC 2016
Country/TerritoryNetherlands
CityDelft
Period22/06/1624/06/16

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