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MEMS-BASED MICROPHONE AND MICROPHONE ASSEMBLY

G.J. Verbiest (Inventor), P.G. Steeneken (Inventor), M.P. Abrahams (Inventor), Jorge Martinez (Inventor)

Research output: Patent

Original languageEnglish
IPCG01L, H04R
Priority date18/08/20
Publication statusPublished - 2022

Bibliographical note

Patent: OCT-20-020
Applicant: TU Delft

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