MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range

Research output: Contribution to journal › Article › Scientific › peer-review

158 Citations (Scopus)

Original language	Undefined/Unknown
Pages (from-to)	145-152
Number of pages	8
Journal	Journal of Micromechanics and Microengineering
Volume	15
DOIs	https://doi.org/doi:10.1088/0960-1317/15/7/021
Publication status	Published - 2005

Keywords

@article{695f0627eee1472a8744b44e2aba172e,

title = "MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range",

keywords = "academic journal papers, ZX CWTS 1.00 <= JFIS < 3.00",

author = "RF Wolffenbuttel",

year = "2005",

doi = "doi:10.1088/0960-1317/15/7/021",

language = "Undefined/Unknown",

volume = "15",

pages = "145--152",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

}

TY - JOUR

T1 - MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range

AU - Wolffenbuttel, RF

PY - 2005

Y1 - 2005

KW - academic journal papers

KW - ZX CWTS 1.00 <= JFIS < 3.00

U2 - doi:10.1088/0960-1317/15/7/021

DO - doi:10.1088/0960-1317/15/7/021

M3 - Article

SN - 0960-1317

VL - 15

SP - 145

EP - 152

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

ER -