Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 145-152 |
Number of pages | 8 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 15 |
DOIs | |
Publication status | Published - 2005 |
Keywords
- academic journal papers
- ZX CWTS 1.00 <= JFIS < 3.00
Research output: Contribution to journal › Article › Scientific › peer-review
Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 145-152 |
Number of pages | 8 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 15 |
DOIs | |
Publication status | Published - 2005 |