MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications

Boyao Zhang; Jia Wei; Amarante J. Bottger; Henk W. van Zeijl; Pasqualina M. Sarro; GuoQi Zhang

doi:10.1109/TRANSDUCERS.2019.8808192

MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications

Boyao Zhang, Jia Wei, Amarante J. Bottger, Henk W. van Zeijl, Pasqualina M. Sarro, GuoQi Zhang

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Abstract

We report the design, fabrication and experimental investigation of a MEMS micro-hotplate (MHP) for fast time-resolved X-ray diffraction (TRXRD) study of Cu nanoparticle paste (nanoCu paste) sintering process. The device and its system are designed to have a 60 ms minimum time interval, uniform temperature distribution and variant gas environments. A TRXRD study of nanoCu paste sintering at 200 °C in H₂-N₂ gas mixture was done using this device. With 1 sec interval, Cu₈O reduction and Cu crystallization in sintering is observed. Results can be combined with other studies to optimize material design and process development.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Subtitle of host publication	Proceedings
Place of Publication	Piscatway, NJ, USA
Publisher	IEEE
Pages	1772-1775
ISBN (Electronic)	978-1-5386-8104-6
ISBN (Print)	78-1-5386-8105-3
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808192
Publication status	Published - 2019
Event	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany Duration: 23 Jun 2019 → 27 Jun 2019

Conference

Conference	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country	Germany
City	Berlin
Period	23/06/19 → 27/06/19

Keywords

Copper nanoparticle paste
MEMS
Microhotplate
TRXRD

Access to Document

10.1109/TRANSDUCERS.2019.8808192

Link to publication in Scopus

Fingerprint Dive into the research topics of 'MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications'. Together they form a unique fingerprint.

1 Dissertation (TU Delft)

Low temperature sintering of copper nanoparticles: Mechanism and die attach application
Zhang, B., 2020, 107 p.
Research output: Thesis › Dissertation (TU Delft)

Cite this

Zhang, B., Wei, J., Bottger, A. J., van Zeijl, H. W., Sarro, P. M., & Zhang, G. (2019). MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII): Proceedings (pp. 1772-1775). [8808192] IEEE. https://doi.org/10.1109/TRANSDUCERS.2019.8808192

Zhang, Boyao ; Wei, Jia ; Bottger, Amarante J. ; van Zeijl, Henk W. ; Sarro, Pasqualina M. ; Zhang, GuoQi. / MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII): Proceedings. Piscatway, NJ, USA : IEEE, 2019. pp. 1772-1775

@inproceedings{047a88f0977046e59fffd8c9119eb19b,

title = "MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications",

abstract = "We report the design, fabrication and experimental investigation of a MEMS micro-hotplate (MHP) for fast time-resolved X-ray diffraction (TRXRD) study of Cu nanoparticle paste (nanoCu paste) sintering process. The device and its system are designed to have a 60 ms minimum time interval, uniform temperature distribution and variant gas environments. A TRXRD study of nanoCu paste sintering at 200 °C in H2-N2 gas mixture was done using this device. With 1 sec interval, Cu8O reduction and Cu crystallization in sintering is observed. Results can be combined with other studies to optimize material design and process development.",

keywords = "Copper nanoparticle paste, MEMS, Microhotplate, TRXRD",

author = "Boyao Zhang and Jia Wei and Bottger, {Amarante J.} and {van Zeijl}, {Henk W.} and Sarro, {Pasqualina M.} and GuoQi Zhang",

year = "2019",

doi = "10.1109/TRANSDUCERS.2019.8808192",

language = "English",

isbn = "78-1-5386-8105-3",

pages = "1772--1775",

booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)",

publisher = "IEEE",

address = "United States",

note = "20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",

}

Zhang, B, Wei, J, Bottger, AJ , van Zeijl, HW , Sarro, PM & Zhang, G 2019, MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII): Proceedings., 8808192, IEEE, Piscatway, NJ, USA, pp. 1772-1775, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany, 23/06/19. https://doi.org/10.1109/TRANSDUCERS.2019.8808192

MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications. / Zhang, Boyao; Wei, Jia; Bottger, Amarante J.; van Zeijl, Henk W.; Sarro, Pasqualina M.; Zhang, GuoQi.

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII): Proceedings. Piscatway, NJ, USA : IEEE, 2019. p. 1772-1775 8808192.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications

AU - Zhang, Boyao

AU - Wei, Jia

AU - Bottger, Amarante J.

AU - van Zeijl, Henk W.

AU - Sarro, Pasqualina M.

AU - Zhang, GuoQi

PY - 2019

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N2 - We report the design, fabrication and experimental investigation of a MEMS micro-hotplate (MHP) for fast time-resolved X-ray diffraction (TRXRD) study of Cu nanoparticle paste (nanoCu paste) sintering process. The device and its system are designed to have a 60 ms minimum time interval, uniform temperature distribution and variant gas environments. A TRXRD study of nanoCu paste sintering at 200 °C in H2-N2 gas mixture was done using this device. With 1 sec interval, Cu8O reduction and Cu crystallization in sintering is observed. Results can be combined with other studies to optimize material design and process development.

AB - We report the design, fabrication and experimental investigation of a MEMS micro-hotplate (MHP) for fast time-resolved X-ray diffraction (TRXRD) study of Cu nanoparticle paste (nanoCu paste) sintering process. The device and its system are designed to have a 60 ms minimum time interval, uniform temperature distribution and variant gas environments. A TRXRD study of nanoCu paste sintering at 200 °C in H2-N2 gas mixture was done using this device. With 1 sec interval, Cu8O reduction and Cu crystallization in sintering is observed. Results can be combined with other studies to optimize material design and process development.

KW - Copper nanoparticle paste

KW - MEMS

KW - Microhotplate

KW - TRXRD

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M3 - Conference contribution

SN - 78-1-5386-8105-3

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EP - 1775

BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

PB - IEEE

CY - Piscatway, NJ, USA

T2 - 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Y2 - 23 June 2019 through 27 June 2019

ER -

Zhang B, Wei J, Bottger AJ , van Zeijl HW , Sarro PM , Zhang G. MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII): Proceedings. Piscatway, NJ, USA: IEEE. 2019. p. 1772-1775. 8808192 https://doi.org/10.1109/TRANSDUCERS.2019.8808192

MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications

Abstract

Conference

Keywords

Access to Document

Low temperature sintering of copper nanoparticles: Mechanism and die attach application

Cite this