MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications

Boyao Zhang; Jia Wei; Amarante J. Bottger; Henk W. van Zeijl; Pasqualina M. Sarro; GuoQi Zhang

doi:10.1109/TRANSDUCERS.2019.8808192

MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications

Boyao Zhang, Jia Wei, Amarante J. Bottger, Henk W. van Zeijl, Pasqualina M. Sarro, GuoQi Zhang

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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Abstract

We report the design, fabrication and experimental investigation of a MEMS micro-hotplate (MHP) for fast time-resolved X-ray diffraction (TRXRD) study of Cu nanoparticle paste (nanoCu paste) sintering process. The device and its system are designed to have a 60 ms minimum time interval, uniform temperature distribution and variant gas environments. A TRXRD study of nanoCu paste sintering at 200 °C in H₂-N₂ gas mixture was done using this device. With 1 sec interval, Cu₈O reduction and Cu crystallization in sintering is observed. Results can be combined with other studies to optimize material design and process development.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Subtitle of host publication	Proceedings
Place of Publication	Piscatway, NJ, USA
Publisher	IEEE
Pages	1772-1775
Number of pages	4
ISBN (Electronic)	9781728120072
ISBN (Print)	78-1-5386-8105-3
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808192
Publication status	Published - 2019
Event	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany Duration: 23 Jun 2019 → 27 Jun 2019

Publication series

Name	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country/Territory	Germany
City	Berlin
Period	23/06/19 → 27/06/19

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

Copper nanoparticle paste
MEMS
Microhotplate
TRXRD

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10.1109/TRANSDUCERS.2019.8808192

MEMS_Enabled_Fast_Time-Resolved_X-Ray_Diffraction_Characterization_Platform_for_Copper_Nanoparticle_Sintering_in_Heterogeneous_Integration_ApplicationsFinal published version, 1.33 MB

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Zhang, B., Wei, J., Bottger, A. J., van Zeijl, H. W., Sarro, P. M., & Zhang, G. (2019). MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII: Proceedings (pp. 1772-1775). Article 8808192 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). IEEE. https://doi.org/10.1109/TRANSDUCERS.2019.8808192

Zhang, Boyao ; Wei, Jia ; Bottger, Amarante J. et al. / MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII: Proceedings. Piscatway, NJ, USA : IEEE, 2019. pp. 1772-1775 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

@inproceedings{047a88f0977046e59fffd8c9119eb19b,

title = "MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications",

abstract = "We report the design, fabrication and experimental investigation of a MEMS micro-hotplate (MHP) for fast time-resolved X-ray diffraction (TRXRD) study of Cu nanoparticle paste (nanoCu paste) sintering process. The device and its system are designed to have a 60 ms minimum time interval, uniform temperature distribution and variant gas environments. A TRXRD study of nanoCu paste sintering at 200 °C in H2-N2 gas mixture was done using this device. With 1 sec interval, Cu8O reduction and Cu crystallization in sintering is observed. Results can be combined with other studies to optimize material design and process development.",

keywords = "Copper nanoparticle paste, MEMS, Microhotplate, TRXRD",

author = "Boyao Zhang and Jia Wei and Bottger, {Amarante J.} and {van Zeijl}, {Henk W.} and Sarro, {Pasqualina M.} and GuoQi Zhang",

note = "Green Open Access added to TU Delft Institutional Repository {\textquoteleft}You share, we take care!{\textquoteright} – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. ; 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",

year = "2019",

doi = "10.1109/TRANSDUCERS.2019.8808192",

language = "English",

isbn = "78-1-5386-8105-3",

series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

publisher = "IEEE",

pages = "1772--1775",

booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

address = "United States",

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Zhang, B, Wei, J , Bottger, AJ , van Zeijl, HW , Sarro, PM & Zhang, G 2019, MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII: Proceedings., 8808192, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, IEEE, Piscatway, NJ, USA, pp. 1772-1775, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany, 23/06/19. https://doi.org/10.1109/TRANSDUCERS.2019.8808192

MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications. / Zhang, Boyao; Wei, Jia ; Bottger, Amarante J. et al.
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII: Proceedings. Piscatway, NJ, USA: IEEE, 2019. p. 1772-1775 8808192 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications

AU - Zhang, Boyao

AU - Wei, Jia

AU - Bottger, Amarante J.

AU - van Zeijl, Henk W.

AU - Sarro, Pasqualina M.

AU - Zhang, GuoQi

N1 - Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2019

Y1 - 2019

N2 - We report the design, fabrication and experimental investigation of a MEMS micro-hotplate (MHP) for fast time-resolved X-ray diffraction (TRXRD) study of Cu nanoparticle paste (nanoCu paste) sintering process. The device and its system are designed to have a 60 ms minimum time interval, uniform temperature distribution and variant gas environments. A TRXRD study of nanoCu paste sintering at 200 °C in H2-N2 gas mixture was done using this device. With 1 sec interval, Cu8O reduction and Cu crystallization in sintering is observed. Results can be combined with other studies to optimize material design and process development.

AB - We report the design, fabrication and experimental investigation of a MEMS micro-hotplate (MHP) for fast time-resolved X-ray diffraction (TRXRD) study of Cu nanoparticle paste (nanoCu paste) sintering process. The device and its system are designed to have a 60 ms minimum time interval, uniform temperature distribution and variant gas environments. A TRXRD study of nanoCu paste sintering at 200 °C in H2-N2 gas mixture was done using this device. With 1 sec interval, Cu8O reduction and Cu crystallization in sintering is observed. Results can be combined with other studies to optimize material design and process development.

KW - Copper nanoparticle paste

KW - MEMS

KW - Microhotplate

KW - TRXRD

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DO - 10.1109/TRANSDUCERS.2019.8808192

M3 - Conference contribution

SN - 78-1-5386-8105-3

T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

SP - 1772

EP - 1775

BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

PB - IEEE

CY - Piscatway, NJ, USA

T2 - 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Y2 - 23 June 2019 through 27 June 2019

ER -

Zhang B, Wei J , Bottger AJ , van Zeijl HW , Sarro PM , Zhang G. MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII: Proceedings. Piscatway, NJ, USA: IEEE. 2019. p. 1772-1775. 8808192. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). doi: 10.1109/TRANSDUCERS.2019.8808192

MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications

Abstract

Publication series

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Bibliographical note

Keywords

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Low temperature sintering of copper nanoparticles: Mechanism and die attach application

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