MEMS for space

NF de Rooij, S. Gautsch, D Briand, C Marxer, U Staufer

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

23 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProc. of Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009
Editors s.n.
Place of PublicationDenver, US
PublisherIEEE Society
Pages17-24
Number of pages8
ISBN (Print)978-1-4244-4193-8
Publication statusPublished - 2009
EventThe 15th Int. Conf. on Solid-State Sensors, Actuators & Microsystems - Denver, US
Duration: 21 Jun 200925 Jun 2009

Publication series

Name
PublisherIEEE

Conference

ConferenceThe 15th Int. Conf. on Solid-State Sensors, Actuators & Microsystems
Period21/06/0925/06/09

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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