@inproceedings{57ad9d4e19234269815e8deb706d1753,
title = "MEMS for space",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "{de Rooij}, NF and S. Gautsch and D Briand and C Marxer and U Staufer",
year = "2009",
language = "Undefined/Unknown",
isbn = "978-1-4244-4193-8",
publisher = "IEEE Society",
pages = "17--24",
editor = "s.n.",
booktitle = "Proc. of Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009",
note = "The 15th Int. Conf. on Solid-State Sensors, Actuators & Microsystems ; Conference date: 21-06-2009 Through 25-06-2009",
}