MEMS for thermogravimetry: Fully integrated device for inspection of nanomasses

E Iervolino, AW van Herwaarden, W van der Vlist, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)1277-1286
Number of pages10
JournalIEEE Journal of Microelectromechanical Systems
Issue number6
Publication statusPublished - 2011


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