MEMS for thermogravimetry: Fully integrated device for inspection of nanomasses

E Iervolino, AW van Herwaarden, W van der Vlist, PM Sarro

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	1277-1286
Number of pages	10
Journal	IEEE Journal of Microelectromechanical Systems
Volume	20
Issue number	6
Publication status	Published - 2011

Keywords

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title = "MEMS for thermogravimetry: Fully integrated device for inspection of nanomasses",

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author = "E Iervolino and \{van Herwaarden\}, AW and \{van der Vlist\}, W and PM Sarro",

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AU - Iervolino, E

AU - van Herwaarden, AW

AU - van der Vlist, W

AU - Sarro, PM

PY - 2011

Y1 - 2011

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

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UR - https://www.scopus.com/pages/publications/82455171963

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JO - IEEE Journal of Microelectromechanical Systems

JF - IEEE Journal of Microelectromechanical Systems

IS - 6

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