MEMS Hotplates with TiN as a Heater Material

JF Creemer, D Briand, W van der Vlist, CR de Boer, HW Zandbergen, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

13 Citations (Scopus)

Name
Publisher	IEEE Publication

NEO

Keywords

@inproceedings{6c1c3d1ae464427fbe295360f3da317b,

title = "MEMS Hotplates with TiN as a Heater Material",

keywords = "Conf.proc. > 3 pag",

author = "JF Creemer and D Briand and {van der Vlist}, W and {de Boer}, CR and HW Zandbergen and PM Sarro",

note = "NEO",

year = "2005",

language = "Undefined/Unknown",

isbn = "0-7803-9057-1",

publisher = "IEEE",

pages = "330--333",

editor = "{Vladimir Lumelsky}",

booktitle = "IEEE Sensors 2005",

address = "United States",

}

TY - GEN

T1 - MEMS Hotplates with TiN as a Heater Material

AU - Creemer, JF

AU - Briand, D

AU - van der Vlist, W

AU - de Boer, CR

AU - Zandbergen, HW

AU - Sarro, PM

N1 - NEO

PY - 2005

Y1 - 2005

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0-7803-9057-1

SP - 330

EP - 333

BT - IEEE Sensors 2005

A2 - Vladimir Lumelsky, null

PB - IEEE

CY - Irvine, California, USA

ER -