MEMS Hotplates with TiN as a Heater Material

JF Creemer, D Briand, W van der Vlist, CR de Boer, HW Zandbergen, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

10 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationIEEE Sensors 2005
Editors Vladimir Lumelsky
Place of PublicationIrvine, California, USA
PublisherIEEE
Pages330-333
Number of pages4
ISBN (Print)0-7803-9057-1
Publication statusPublished - 2005

Publication series

Name
PublisherIEEE Publication

Keywords

  • Conf.proc. > 3 pag

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