MEMS integration techniques on silicon-on-insulator for inertial devices

V Rajaraman

Research output: Thesis › Dissertation (TU Delft)

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • Dekker, R., Supervisor
  • Makinwa, K.A.A., Advisor
Award date21 May 2012
Print ISBNs978-94-6191-316-6
Publication statusPublished - 2012

Keywords

  • Diss. prom. aan TU Delft

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