MEMS monocrystalline-silicon based thermal devices for chemical and microfluidic applications

M Mihailovic

Research output: ThesisDissertation (TU Delft)

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • Sarro, P.M., Supervisor
Award date29 Jun 2011
Print ISBNs978-90-5335-430-8
Publication statusPublished - 2011

Keywords

  • Diss. prom. aan TU Delft

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