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Mems nanoreactor for atomic-resolution microscopy of nanomaterials in their working state

  • JF Creemer
  • , S Helveg
  • , GH Hoveling
  • , S Ullman
  • , PJ Kooyman
  • , AM Molenbroek
  • , HW Zandbergen
  • , PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings 22nd IEEE International Conference on Micro Electro Mechanical Systems 2009
EditorsPM Sarro, C Hierold
Place of PublicationSorrento
PublisherIEEE
Pages76-79
Number of pages4
ISBN (Print)978-1-4244-2977-6
Publication statusPublished - 2009
Event22nd IEEE International Conference on Micro Electro Mechanical Systems 2009 (MEMS 2009) - Sorrento
Duration: 25 Jan 200929 Jan 2009

Publication series

Name
PublisherIEEE

Conference

Conference22nd IEEE International Conference on Micro Electro Mechanical Systems 2009 (MEMS 2009)
Period25/01/0929/01/09

Keywords

  • Conf.proc. > 3 pag

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