MEMS oscillating squeeze-film pressure sensor with optoelectronic feedback

L Kumar, K Reimann, MJ Goossens, WF Besling, RJ Dolleman, RH Pijnenburg, PG Steeneken

Research output: Contribution to journalArticleScientificpeer-review

13 Citations (Scopus)
Original languageEnglish
Pages (from-to)054011-054020
Number of pages10
JournalJournal of Micromechanics and Microengineering
Volume25
Issue number4
Publication statusPublished - 2015

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