MEMS oscillating squeeze-film pressure sensor with optoelectronic feedback

L Kumar, K Reimann, MJ Goossens, WF Besling, RJ Dolleman, RH Pijnenburg, PG Steeneken

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	054011-054020
Number of pages	10
Journal	Journal of Micromechanics and Microengineering
Volume	25
Issue number	4
Publication status	Published - 2015

Cite this

@article{7cfc035e0c2b4eaebb4850ed4d206043,

title = "MEMS oscillating squeeze-film pressure sensor with optoelectronic feedback",

author = "L Kumar and K Reimann and MJ Goossens and WF Besling and RJ Dolleman and RH Pijnenburg and PG Steeneken",

year = "2015",

language = "English",

volume = "25",

pages = "054011--054020",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

number = "4",

}

TY - JOUR

T1 - MEMS oscillating squeeze-film pressure sensor with optoelectronic feedback

AU - Kumar, L

AU - Reimann, K

AU - Goossens, MJ

AU - Besling, WF

AU - Dolleman, RJ

AU - Pijnenburg, RH

AU - Steeneken, PG

PY - 2015

Y1 - 2015

M3 - Article

SN - 0960-1317

VL - 25

SP - 54011

EP - 54020

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 4

ER -