@inproceedings{2a7e91ebc7614a3cb8626fc34d2920a0,
title = "MEMS Technology for Miniaturized Space Systems: Needs, Status and Perspectives",
keywords = "Peer-lijst tijdschrift",
author = "J Guo and EKA Gill",
year = "2012",
doi = "10.1117/12.907450",
language = "English",
isbn = "978-0-8194-8893-0",
publisher = "SPIE",
pages = "1--10",
editor = "S.M. Garcia-Blanco",
booktitle = "Proceedings of SPIE",
address = "United States",
note = "Photonics West 2012 ; Conference date: 21-01-2012 Through 26-01-2012",
}