MEMS technology in eletrical metrology

Research output: Contribution to journalArticleScientificpeer-review

Original languageUndefined/Unknown
Pages (from-to)102-107
Number of pages6
JournalJapanese Jounal of the Society On Instrumentation and Control Engineering
Volume41
Issue number1
Publication statusPublished - 2002

Keywords

  • Elektrotechniek
  • Techniek
  • ZX Nader te bep. ivm conversie

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