MEMS test structure for measuring thermal conductivity of thin films

L La Spina; N Nenadovic; AW van Herwaarden; H Schellevis; WHA Wien; LK Nanver

MEMS test structure for measuring thermal conductivity of thin films

L La Spina, N Nenadovic, AW van Herwaarden, H Schellevis, WHA Wien, LK Nanver

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

14 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	Proc. IEEE International Conference on Microelectronic Test Structures
Editors	s.n.
Place of Publication	Austin, USA
Publisher	Electron Device Society
Pages	137-142
Number of pages	6
ISBN (Print)	1-4244-0167-4
Publication status	Published - 2006
Event	IEEE International Conference on Microelectronic Test Structures - Austin, USA Duration: 6 Mar 2006 → 9 Mar 2006

Publication series

Name
Publisher	Electron Device Society

Conference

Conference	IEEE International Conference on Microelectronic Test Structures
Period	6/03/06 → 9/03/06

Keywords

Elektrotechniek
Techniek
conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{28d2261939244c94b3cc62da71fdb414,

title = "MEMS test structure for measuring thermal conductivity of thin films",

keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",

author = "{La Spina}, L and N Nenadovic and {van Herwaarden}, AW and H Schellevis and WHA Wien and LK Nanver",

year = "2006",

language = "Undefined/Unknown",

isbn = "1-4244-0167-4",

publisher = "Electron Device Society",

pages = "137--142",

editor = "s.n.",

booktitle = "Proc. IEEE International Conference on Microelectronic Test Structures",

note = "IEEE International Conference on Microelectronic Test Structures ; Conference date: 06-03-2006 Through 09-03-2006",

}

La Spina, L, Nenadovic, N, van Herwaarden, AW, Schellevis, H , Wien, WHA & Nanver, LK 2006, MEMS test structure for measuring thermal conductivity of thin films. in s.n. (ed.), Proc. IEEE International Conference on Microelectronic Test Structures. Electron Device Society, Austin, USA, pp. 137-142, IEEE International Conference on Microelectronic Test Structures, 6/03/06.

MEMS test structure for measuring thermal conductivity of thin films. / La Spina, L; Nenadovic, N; van Herwaarden, AW et al.
Proc. IEEE International Conference on Microelectronic Test Structures. ed. / s.n. Austin, USA: Electron Device Society, 2006. p. 137-142.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - MEMS test structure for measuring thermal conductivity of thin films

AU - La Spina, L

AU - Nenadovic, N

AU - van Herwaarden, AW

AU - Schellevis, H

AU - Wien, WHA

AU - Nanver, LK

PY - 2006

Y1 - 2006

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 1-4244-0167-4

SP - 137

EP - 142

BT - Proc. IEEE International Conference on Microelectronic Test Structures

A2 - s.n., null

PB - Electron Device Society

CY - Austin, USA

T2 - IEEE International Conference on Microelectronic Test Structures

Y2 - 6 March 2006 through 9 March 2006

ER -