MEMS test structure for measuring thermal conductivity of thin films

L La Spina, N Nenadovic, AW van Herwaarden, H Schellevis, WHA Wien, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

13 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProc. IEEE International Conference on Microelectronic Test Structures
Editors s.n.
Place of PublicationAustin, USA
PublisherElectron Device Society
Pages137-142
Number of pages6
ISBN (Print)1-4244-0167-4
Publication statusPublished - 2006
EventIEEE International Conference on Microelectronic Test Structures - Austin, USA
Duration: 6 Mar 20069 Mar 2006

Publication series

Name
PublisherElectron Device Society

Conference

ConferenceIEEE International Conference on Microelectronic Test Structures
Period6/03/069/03/06

Keywords

  • Elektrotechniek
  • Techniek
  • conference contrib. refereed
  • Conf.proc. > 3 pag

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