MEMS/MOEMS technology capabilities and trends

Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	MEMS and MOEMS technology and applications
Editors	P Rai-Choudhury
Place of Publication	Bellingham
Publisher	SPIE
Pages	1-46
ISBN (Print)	0-9194-3716-6
Publication status	Published - 2000

Keywords

@inbook{7136041c3c184107951bcb05ce94dc3c,

title = "MEMS/MOEMS technology capabilities and trends",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "PJ French",

year = "2000",

language = "Undefined/Unknown",

isbn = "0-9194-3716-6",

pages = "1--46",

editor = "{P Rai-Choudhury}",

booktitle = "MEMS and MOEMS technology and applications",

publisher = "SPIE",

address = "United States",

}