Merging standard CVD techniques for Ga-As and Si eptaxial growth

A Sammak, WB De Boer, A van den Boogaard, LK Nanver

Research output: Contribution to journalConference articleScientificpeer-review

8 Citations (Scopus)
Original languageEnglish
Pages (from-to)237-244
Number of pages8
JournalECS Transactions
Volume28
Issue number5
Publication statusPublished - 2010

Keywords

  • Peer-lijst tijdschrift

Cite this