Merging standard CVD techniques for Ga-As and Si eptaxial growth

Research output: Contribution to journal › Conference article › Scientific › peer-review

Keywords

@article{94268f66430a41cca3f882009ffffd2a,

title = "Merging standard CVD techniques for Ga-As and Si eptaxial growth",

keywords = "Peer-lijst tijdschrift",

author = "A Sammak and \{De Boer\}, WB and \{van den Boogaard\}, A and LK Nanver",

year = "2010",

language = "English",

volume = "28",

pages = "237--244",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Institute of Physics",

number = "5",

}