Metal, barrier and oxide deposition for evolutionairy architecture

Y Gobil, K Maex, HJ Barth, GCAM Janssen

    Research output: Book/ReportReportProfessional

    Original languageUndefined/Unknown
    Place of PublicationDelft
    PublisherDelft University of Technology
    Number of pages23
    Publication statusPublished - 1998

    Publication series

    Name
    PublisherTechnishe Universiteit Delft

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