Metal patterning on high topography surface for 3D RF devices fabrication

PN Pham, E Boellaard, WHA Wien, LDM van den Brekel, JN Burghartz, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings EUROSENSOR 2003
Editors	s.n.
Place of Publication	Guimaraes, Portugal
Publisher	University of Minho, Dept. of Industrial Electronics
Pages	440-443
Number of pages	4
Publication status	Published - 2003
Event	17th European conference on solid-state transducers, Guimaraes, Portugal - Guimaraes, Portugal Duration: 21 Sept 2003 → 24 Sept 2003

Name
Publisher	University of Minho, Dept. of Industrial Electronics

Conference	17th European conference on solid-state transducers, Guimaraes, Portugal
Period	21/09/03 → 24/09/03

Keywords

@inproceedings{faed1d8ea5e549348811abefe6909f88,

title = "Metal patterning on high topography surface for 3D RF devices fabrication",

keywords = "Conf.proc. > 3 pag",

author = "PN Pham and E Boellaard and WHA Wien and {van den Brekel}, LDM and JN Burghartz and PM Sarro",

year = "2003",

language = "Undefined/Unknown",

publisher = "University of Minho, Dept. of Industrial Electronics",

pages = "440--443",

editor = "s.n.",

booktitle = "Proceedings EUROSENSOR 2003",

note = "17th European conference on solid-state transducers, Guimaraes, Portugal ; Conference date: 21-09-2003 Through 24-09-2003",

}

Pham, PN, Boellaard, E, Wien, WHA, van den Brekel, LDM, Burghartz, JN & Sarro, PM 2003, Metal patterning on high topography surface for 3D RF devices fabrication. in s.n. (ed.), Proceedings EUROSENSOR 2003. University of Minho, Dept. of Industrial Electronics, Guimaraes, Portugal, pp. 440-443, 17th European conference on solid-state transducers, Guimaraes, Portugal, 21/09/03.

Metal patterning on high topography surface for 3D RF devices fabrication. / Pham, PN; Boellaard, E; Wien, WHA et al.
Proceedings EUROSENSOR 2003. ed. / s.n. Guimaraes, Portugal: University of Minho, Dept. of Industrial Electronics, 2003. p. 440-443.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Metal patterning on high topography surface for 3D RF devices fabrication

AU - Pham, PN

AU - Boellaard, E

AU - Wien, WHA

AU - van den Brekel, LDM

AU - Burghartz, JN

AU - Sarro, PM

PY - 2003

Y1 - 2003

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 440

EP - 443

BT - Proceedings EUROSENSOR 2003

A2 - s.n., null

PB - University of Minho, Dept. of Industrial Electronics

CY - Guimaraes, Portugal

T2 - 17th European conference on solid-state transducers, Guimaraes, Portugal

Y2 - 21 September 2003 through 24 September 2003

ER -