Metal patterning on high topography surface for 3D RF devices fabrication

PN Pham, E Boellaard, WHA Wien, LDM van den Brekel, JN Burghartz, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings EUROSENSOR 2003
Editors s.n.
Place of PublicationGuimaraes, Portugal
PublisherUniversity of Minho, Dept. of Industrial Electronics
Pages440-443
Number of pages4
Publication statusPublished - 2003
Event17th European conference on solid-state transducers, Guimaraes, Portugal - Guimaraes, Portugal
Duration: 21 Sep 200324 Sep 2003

Publication series

Name
PublisherUniversity of Minho, Dept. of Industrial Electronics

Conference

Conference17th European conference on solid-state transducers, Guimaraes, Portugal
Period21/09/0324/09/03

Keywords

  • Conf.proc. > 3 pag

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