@article{ab87f7d300784ad9aae932d94aaeece6,
title = "Metal patterning on high topography surface for 3D RF devices fabrication",
keywords = "ZX CWTS 1.00 <= JFIS < 3.00",
author = "NP Pham and E Boellaard and WHA Wien and {van den Brekel}, LDM and JN Burghartz and PM Sarro",
year = "2004",
language = "Undefined/Unknown",
volume = "115",
pages = "557--562",
journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",
issn = "0924-4247",
publisher = "Elsevier",
}