Metal patterning on high topography surface for 3D RF devices fabrication

NP Pham, E Boellaard, WHA Wien, LDM van den Brekel, JN Burghartz, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

10 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)557-562
Number of pages6
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Publication statusPublished - 2004


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