| Original language | Undefined/Unknown |
|---|---|
| Title of host publication | New interconnect Materials and Architectures for next CMOS generations |
| Editors | H Maes |
| Pages | 67-91 |
| Number of pages | 25 |
| Publication status | Published - 1998 |
Metallization
GCAM Janssen
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific