Method and apparatus for controlled manufacturing of nanometer-scale apertures

AJ Storm (Inventor), HW Zandbergen (Inventor)

    Research output: Patent

    Original languageUndefined/Unknown
    Patent numberEP1599411
    IPCOctrooiaanvraag tnv TU Delft
    Priority date30/11/05
    Publication statusPublished - 2005

    Keywords

    • other publications
    • Octrooi

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