Method and apparatus for controlled manufacturing of nanometer-scale apertures

AJ Storm (Inventor), HW Zandbergen (Inventor)

    Research output: Patent

    Original languageUndefined/Unknown
    Patent numberWO2004078640
    IPCaanvrager: TU Delft oct-03-004
    Priority date16/09/04
    Publication statusPublished - 2004

    Keywords

    • Octrooi

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