Method and apparatus for controlled manufacturing of nanometer-scale apertures

AJ Storm (Inventor), HW Zandbergen (Inventor)

Research output: Patent

Original language	Undefined/Unknown
Patent number	EP1599411
IPC	Octrooiaanvraag tnv TU Delft
Priority date	30/11/05
Publication status	Published - 2005

Octrooiaanvraag tnv TU Delft

Keywords

@misc{f80f86fbb90b45619b4405376262326c,

title = "Method and apparatus for controlled manufacturing of nanometer-scale apertures",

keywords = "other publications, Octrooi",

author = "AJ Storm and HW Zandbergen",

note = "Octrooiaanvraag tnv TU Delft; EP1599411; Octrooiaanvraag tnv TU Delft",

year = "2005",

language = "Undefined/Unknown",

type = "Patent",

}