Research output per year
Research output per year
| Original language | English |
|---|---|
| IPC | G03F; G01B |
| Priority date | 21/03/11 |
| Publication status | Published - 2012 |
Bibliographical note
Patent: OCT-13-090Applicant: ASML Netherlands B.V.
Research output
- 1 Patent
-
Method and Apparatus for Determining Structure Parameters of Microstructures
El Gawhary, O. & Petra, S., 2014, IPC No. G03F; G01B, Patent No. TW 1464366, Priority date 21 Mar 2011Research output: Patent