Method and Apparatus for Determining Structure Parameters of Microstructures

Omar El Gawhary (Inventor), Stefan Petra (Inventor)

ImPhys/Optics

Research output: Patent

1 Patent

1 results

2014

Method and Apparatus for Determining Structure Parameters of Microstructures
El Gawhary, O. & Petra, S., 2014, IPC No. G03F; G01B, Patent No. TW 1464366, Priority date 21 Mar 2011
Research output: Patent