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Method and Apparatus for Determining Structure Parameters of Microstructures
Omar El Gawhary
(Inventor), Stefan Petra (Inventor)
ImPhys/Optics
Research output
:
Patent
Overview
Research output
(1)
Research output
Research output per year
2012
2012
2012
1
Patent
Research output per year
Research output per year
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2012
Method and Apparatus for Determining Structure Parameters of Microstructures
El Gawhary, O.
&
Petra, S.
,
2012
, IPC No. G03F; G01B, Priority date
21 Mar 2011
, Priority No. US 2012/0243004 A1
Research output
:
Patent