Method and apparatus for in-situ sample quality inspection in cryogenic focused ion beam milling

R. Skoupý (Inventor), A. Jakobi (Inventor), D.B. Boltje (Inventor), J.P. Hoogenboom (Inventor)

Research output: Patent

Original languageEnglish
IPCH01J, G01N
Priority date29/07/22
Publication statusPublished - 2024

Bibliographical note

Patent: OCT-22-045
Applicant: TU Delft

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