Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus

HV Kok (Inventor), K Kivits (Inventor), R van de Laak (Inventor), JM Kuiper (Inventor), G van der Zouw (Inventor), HPT Tolsma (Inventor)

Research output: Patent

Original languageEnglish
Patent numberUS7,773,235 B2
IPCaangevraagd door ASML NL, Veldhoven (NL)
Priority date10/08/10
Publication statusPublished - 2010


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