Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus

HV Kok (Inventor), K Kivits (Inventor), R van de Laak (Inventor), JM Kuiper (Inventor), G van der Zouw (Inventor), HPT Tolsma (Inventor)

Research output: Patent

Original language	English
Patent number	US7,773,235 B2
IPC	aangevraagd door ASML NL, Veldhoven (NL)
Priority date	10/08/10
Publication status	Published - 2010

aangevraagd door ASML NL, Veldhoven (NL)

Keywords

@misc{4f825e0275c04f5fb52be4b792f2a2ae,

title = "Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus",

keywords = "Octrooi",

author = "HV Kok and K Kivits and {van de Laak}, R and JM Kuiper and {van der Zouw}, G and HPT Tolsma",

note = "aangevraagd door ASML NL, Veldhoven (NL); US7,773,235 B2; aangevraagd door ASML NL, Veldhoven (NL)",

year = "2010",

language = "English",

type = "Patent",

}