Method for determining a spring constant of an atomic force microscopy using coupling electrostatic pull-in instability and resonance frequency

H Sadeghian Marnani (Inventor), F van Keulen (Inventor)

Research output: Patent

Original languageEnglish
Patent number2009014
IPCOCT-11-017
Priority date17/12/13
Publication statusPublished - 2013

Keywords

  • Geen VSNU-classificatie

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