| Original language | Undefined/Unknown |
|---|---|
| Patent number | US 8885973 B2 |
| IPC | Aanvrager: FEI Company. Niet eerder opgenomen. |
| Priority date | 11/11/14 |
| Publication status | Published - 2014 |
Method for determining distortions in a particle-optical apparatus
M van der Stam (Inventor), B Rieger (Inventor)
Research output: Patent