Method for determining distortions in a particle-optical apparatus

M van der Stam (Inventor), B Rieger (Inventor)

    Research output: Patent

    Original languageUndefined/Unknown
    Patent numberUS 8885973 B2
    IPCAanvrager: FEI Company. Niet eerder opgenomen.
    Priority date11/11/14
    Publication statusPublished - 2014

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