Method for determining the aberration coefficients of the aberration function of a particle-opticle lens

M Zande (Inventor), C Kok (Inventor), B Rieger (Inventor)

    Research output: Patent

    Original languageUndefined/Unknown
    Patent numberEP 1804272 B1
    IPCAanvrager: Fei Company
    Priority date1/07/09
    Publication statusPublished - 2009

    Keywords

    • Octrooi

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