Method for Fabrication of Large-Aspect-Ratio Nano-Thickness Mirrors

Simon Groeblacher (Inventor), Richard Norte (Inventor)

Research output: Patent

Original languageEnglish
IPCG02B, B82Y
Priority date26/09/17
Publication statusPublished - 2019

Bibliographical note

Patent: OCT-17-069
Applicant: TU Delft

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